# CNN Based Lithography Hotspot Detection

> Research article (International Journal of Fuzzy Logic and Intelligent Systems, 2016) · cited 19× · AI/ML

**Wikidata**: [openalex:W2531057735](https://www.wikidata.org/wiki/openalex:W2531057735)  
**Source**: https://4ort.xyz/entity/cnn-based-lithography-hotspot-detection