# Closed-Loop Control of an XYZ Micro-Stage and Designing of Mechanical Structure for Reduction in Motion Errors

> Research article (Nanomanufacturing and Metrology, 2021) · cited 11× · AI/ML

**Wikidata**: [openalex:W3122095459](https://www.wikidata.org/wiki/openalex:W3122095459)  
**Source**: https://4ort.xyz/entity/closed-loop-control-of-an-xyz-micro-stage-and-designing-of-mechanical-structure-for-reduction-in-motion-errors