# Chip-Scale MEMS-CMOS Multispectral Infrared Chemical Sensor

> Research article (2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS), 2019) · cited 11× · AI/ML

**Wikidata**: [openalex:W2980908202](https://www.wikidata.org/wiki/openalex:W2980908202)  
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