# Chemical Etch Rate and X-Ray Structure of Reactive Sputtered c-Axis Aligned Crystalline In<sub>x</sub>Ga<sub>y</sub>Zn<sub>z</sub>O<sub>4</sub>Films

> Research article (ECS Journal of Solid State Science and Technology, 2015) · cited 24× · AI/ML

**Wikidata**: [openalex:W2144156311](https://www.wikidata.org/wiki/openalex:W2144156311)  
**Source**: https://4ort.xyz/entity/chemical-etch-rate-and-x-ray-structure-of-reactive-sputtered-c-axis-aligned-crystalline-in-sub-x-sub-ga-sub-y-sub-zn-sub