# Charge-Based Capacitive Self-Sensing With Continuous State Observation for Resonant Electrostatic MEMS Mirrors

> Research article (Journal of Microelectromechanical Systems, 2021) · cited 14× · AI/ML

**Wikidata**: [openalex:W3198557591](https://www.wikidata.org/wiki/openalex:W3198557591)  
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