# Characterization of SOI MEMS capacitive accelerometer under varying acceleration shock pulse durations

> Research article (Microsystem Technologies, 2021) · cited 15× · AI/ML

**Wikidata**: [openalex:W3163707595](https://www.wikidata.org/wiki/openalex:W3163707595)  
**Source**: https://4ort.xyz/entity/characterization-of-soi-mems-capacitive-accelerometer-under-varying-acceleration-shock-pulse-durations