# Characterization of measurement and instrument noise in areal surface topography measurements by the Allan deviation

> Research article (CIRP Annals, 2023) · cited 13× · AI/ML

**Wikidata**: [openalex:W4366372196](https://www.wikidata.org/wiki/openalex:W4366372196)  
**Source**: https://4ort.xyz/entity/characterization-of-measurement-and-instrument-noise-in-areal-surface-topography-measurements-by-the-allan-deviation