# Characterization and mitigation of 3D mask effects in extreme ultraviolet lithography

> Research article (Advanced Optical Technologies, 2017) · cited 66× · AI/ML

**Wikidata**: [openalex:W2613306844](https://www.wikidata.org/wiki/openalex:W2613306844)  
**Source**: https://4ort.xyz/entity/characterization-and-mitigation-of-3d-mask-effects-in-extreme-ultraviolet-lithography