# Characteristics of hexagonal c-oriented titanium film as the template for GaN epitaxy on glass substrate by electron beam evaporation

> Research article (Thin Solid Films, 2017) · cited 12× · AI/ML

**Wikidata**: [openalex:W2579763435](https://www.wikidata.org/wiki/openalex:W2579763435)  
**Source**: https://4ort.xyz/entity/characteristics-of-hexagonal-c-oriented-titanium-film-as-the-template-for-gan-epitaxy-on-glass-substrate-by-electron-bea