# Chamber-to-Chamber Discrepancy Detection in Semiconductor Manufacturing

> Research article (IEEE Transactions on Semiconductor Manufacturing, 2020) · cited 16× · AI/ML

**Wikidata**: [openalex:W2998854917](https://www.wikidata.org/wiki/openalex:W2998854917)  
**Source**: https://4ort.xyz/entity/chamber-to-chamber-discrepancy-detection-in-semiconductor-manufacturing