# CDID: A System for Identifying the Root Cause of a Defect in Semiconductor Wafer Fabrication

> Research article (IEEE Transactions on Semiconductor Manufacturing, 2018) · cited 10× · AI/ML

**Wikidata**: [openalex:W2789585590](https://www.wikidata.org/wiki/openalex:W2789585590)  
**Source**: https://4ort.xyz/entity/cdid-a-system-for-identifying-the-root-cause-of-a-defect-in-semiconductor-wafer-fabrication