# Carrier phase distribution based scan step noise correction for white light interferometry topography measurements

> Research article (Optics and Lasers in Engineering, 2023) · cited 14× · AI/ML

**Wikidata**: [openalex:W4383336540](https://www.wikidata.org/wiki/openalex:W4383336540)  
**Source**: https://4ort.xyz/entity/carrier-phase-distribution-based-scan-step-noise-correction-for-white-light-interferometry-topography-measurements