# Capacitively coupled plasma

> type of industrial plasma source

**Wikidata**: [Q5034482](https://www.wikidata.org/wiki/Q5034482)  
**Wikipedia**: [English](https://en.wikipedia.org/wiki/Capacitively_coupled_plasma)  
**Source**: https://4ort.xyz/entity/capacitively-coupled-plasma


## References

1. [OpenAlex](https://docs.openalex.org/download-snapshot/snapshot-data-format)