# Capacitive MEMS Accelerometer With Perforated and Electrically Separated Mass Structure for Low Noise and Low Power

> Research article (Journal of Microelectromechanical Systems, 2019) · cited 41× · AI/ML

**Wikidata**: [openalex:W2922773592](https://www.wikidata.org/wiki/openalex:W2922773592)  
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