# Canny Algorithm Enabling Precise Offline Line Edge Roughness Acquisition in High-Resolution Lithography

> Research article (ACS Omega, 2023) · cited 10× · AI/ML

**Wikidata**: [openalex:W4317375829](https://www.wikidata.org/wiki/openalex:W4317375829)  
**Source**: https://4ort.xyz/entity/canny-algorithm-enabling-precise-offline-line-edge-roughness-acquisition-in-high-resolution-lithography