# Bottom-up Cu filling of annular through silicon vias: Microstructure and texture

> Research article (Electrochimica Acta, 2020) · cited 32× · AI/ML

**Wikidata**: [openalex:W3000522971](https://www.wikidata.org/wiki/openalex:W3000522971)  
**Source**: https://4ort.xyz/entity/bottom-up-cu-filling-of-annular-through-silicon-vias-microstructure-and-texture
