# Big data analytic for multivariate fault detection and classification in semiconductor manufacturing

> Research article (2017 13th IEEE Conference on Automation Science and Engineering (CASE), 2017) · cited 12× · AI/ML

**Wikidata**: [openalex:W2783371800](https://www.wikidata.org/wiki/openalex:W2783371800)  
**Source**: https://4ort.xyz/entity/big-data-analytic-for-multivariate-fault-detection-and-classification-in-semiconductor-manufacturing