# Beyond decentralized wafer/reticle stage control design: A double-Youla approach for enhancing synchronized motion

> Research article (Control Engineering Practice, 2018) · cited 21× · AI/ML

**Wikidata**: [openalex:W2899341005](https://www.wikidata.org/wiki/openalex:W2899341005)  
**Source**: https://4ort.xyz/entity/beyond-decentralized-wafer-reticle-stage-control-design-a-double-youla-approach-for-enhancing-synchronized-motion