# Bend the curve – Shape optimization in laser grayscale direct write lithography using a single figure of merit

> Research article (Micro and Nano Engineering, 2022) · cited 16× · AI/ML

**Wikidata**: [openalex:W4224913919](https://www.wikidata.org/wiki/openalex:W4224913919)  
**Source**: https://4ort.xyz/entity/bend-the-curve-shape-optimization-in-laser-grayscale-direct-write-lithography-using-a-single-figure-of-merit