# Automatic layout feature extraction for lithography hotspot detection based on deep neural network

> Research article (Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2016) · cited 45× · AI/ML

**Wikidata**: [openalex:W2302532728](https://www.wikidata.org/wiki/openalex:W2302532728)  
**Source**: https://4ort.xyz/entity/automatic-layout-feature-extraction-for-lithography-hotspot-detection-based-on-deep-neural-network