# Automatic correction of lithography hotspots with a deep generative model

> Research article (Optical Microlithography XXXII, 2019) · cited 11× · AI/ML

**Wikidata**: [openalex:W2921602619](https://www.wikidata.org/wiki/openalex:W2921602619)  
**Source**: https://4ort.xyz/entity/automatic-correction-of-lithography-hotspots-with-a-deep-generative-model