# Augmenting mask-based lithography with direct laser writing to increase resolution and speed

> Research article (Optics Express, 2018) · cited 23× · AI/ML

**Wikidata**: [openalex:W2789529243](https://www.wikidata.org/wiki/openalex:W2789529243)  
**Source**: https://4ort.xyz/entity/augmenting-mask-based-lithography-with-direct-laser-writing-to-increase-resolution-and-speed