# Atomically resolved mapping of EELS fine structures

> Research article (Materials Science in Semiconductor Processing, 2016) · cited 49× · AI/ML

**Wikidata**: [openalex:W2494467871](https://www.wikidata.org/wiki/openalex:W2494467871)  
**Source**: https://4ort.xyz/entity/atomically-resolved-mapping-of-eels-fine-structures