# Atomic simulation of textured silicon carbide surface ultra-precision polishing

> Research article (Ceramics International, 2022) · cited 53× · AI/ML

**Wikidata**: [openalex:W4214944327](https://www.wikidata.org/wiki/openalex:W4214944327)  
**Source**: https://4ort.xyz/entity/atomic-simulation-of-textured-silicon-carbide-surface-ultra-precision-polishing
