# Assist features: placement, impact, and relevance for EUV imaging

> Research article (Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2016) · cited 19× · AI/ML

**Wikidata**: [openalex:W2317632783](https://www.wikidata.org/wiki/openalex:W2317632783)  
**Source**: https://4ort.xyz/entity/assist-features-placement-impact-and-relevance-for-euv-imaging