# Assessment of tunnel oxide and poly-Si channel traps in 3D SONOS memory before and after P/E cycling

> Research article (Microelectronic Engineering, 2015) · cited 11× · AI/ML

**Wikidata**: [openalex:W2014694377](https://www.wikidata.org/wiki/openalex:W2014694377)  
**Source**: https://4ort.xyz/entity/assessment-of-tunnel-oxide-and-poly-si-channel-traps-in-3d-sonos-memory-before-and-after-p-e-cycling
