# Assembled Comb-Drive XYZ-Microstage With Large Displacements and Low Crosstalk for Scanning Force Microscopy

> Research article (Journal of Microelectromechanical Systems, 2021) · cited 13× · AI/ML

**Wikidata**: [openalex:W3212108242](https://www.wikidata.org/wiki/openalex:W3212108242)  
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