# Artificial Neural Network for Diffraction Based Overlay Measurement

> Research article (IEEE Access, 2016) · cited 31× · AI/ML

**Wikidata**: [openalex:W2537392793](https://www.wikidata.org/wiki/openalex:W2537392793)  
**Source**: https://4ort.xyz/entity/artificial-neural-network-for-diffraction-based-overlay-measurement