# Artificial Immune System for Fault Detection and Classification of Semiconductor Equipment

> Research article (Electronics, 2021) · cited 26× · AI/ML

**Wikidata**: [openalex:W3153695212](https://www.wikidata.org/wiki/openalex:W3153695212)  
**Source**: https://4ort.xyz/entity/artificial-immune-system-for-fault-detection-and-classification-of-semiconductor-equipment