# Applying Data Augmentation and Mask R-CNN-Based Instance Segmentation Method for Mixed-Type Wafer Maps Defect Patterns Classification

> Research article (IEEE Transactions on Semiconductor Manufacturing, 2021) · cited 52× · AI/ML

**Wikidata**: [openalex:W3207056758](https://www.wikidata.org/wiki/openalex:W3207056758)  
**Source**: https://4ort.xyz/entity/applying-data-augmentation-and-mask-r-cnn-based-instance-segmentation-method-for-mixed-type-wafer-maps-defect-patterns-c