# Application of 1D ResNet for Multivariate Fault Detection on Semiconductor Manufacturing Equipment

> Research article (Sensors, 2023) · cited 17× · AI/ML

**Wikidata**: [openalex:W4388573975](https://www.wikidata.org/wiki/openalex:W4388573975)  
**Source**: https://4ort.xyz/entity/application-of-1d-resnet-for-multivariate-fault-detection-on-semiconductor-manufacturing-equipment