# Anomaly Detection Using Signal Segmentation and One-Class Classification in Diffusion Process of Semiconductor Manufacturing

> Research article (Sensors, 2021) · cited 15× · AI/ML

**Wikidata**: [openalex:W3171622190](https://www.wikidata.org/wiki/openalex:W3171622190)  
**Source**: https://4ort.xyz/entity/anomaly-detection-using-signal-segmentation-and-one-class-classification-in-diffusion-process-of-semiconductor-manufactu