# Anomaly Detection in Time Series Data and its Application to Semiconductor Manufacturing

> Research article (IEEE Access, 2023) · cited 14× · AI/ML

**Wikidata**: [openalex:W4388666602](https://www.wikidata.org/wiki/openalex:W4388666602)  
**Source**: https://4ort.xyz/entity/anomaly-detection-in-time-series-data-and-its-application-to-semiconductor-manufacturing