# Anomaly Detection in Batch Manufacturing Processes Using Localized Reconstruction Errors From 1-D Convolutional AutoEncoders

> Research article (IEEE Transactions on Semiconductor Manufacturing, 2022) · cited 17× · AI/ML

**Wikidata**: [openalex:W4312862187](https://www.wikidata.org/wiki/openalex:W4312862187)  
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