# Anomaly detection for sensor data of semiconductor manufacturing equipment using a GAN

> Research article (Procedia Computer Science, 2021) · cited 18× · AI/ML

**Wikidata**: [openalex:W3204167189](https://www.wikidata.org/wiki/openalex:W3204167189)  
**Source**: https://4ort.xyz/entity/anomaly-detection-for-sensor-data-of-semiconductor-manufacturing-equipment-using-a-gan