# Anomaly Detection for Semiconductor Tools Using Stacked Autoencoder Learning

> Research article (2018 International Symposium on Semiconductor Manufacturing (ISSM), 2018) · cited 20× · AI/ML

**Wikidata**: [openalex:W2918377632](https://www.wikidata.org/wiki/openalex:W2918377632)  
**Source**: https://4ort.xyz/entity/anomaly-detection-for-semiconductor-tools-using-stacked-autoencoder-learning