# Anomaly Detection Approaches for Semiconductor Manufacturing

> Research article (Procedia Manufacturing, 2017) · cited 77× · AI/ML

**Wikidata**: [openalex:W2755997547](https://www.wikidata.org/wiki/openalex:W2755997547)  
**Source**: https://4ort.xyz/entity/anomaly-detection-approaches-for-semiconductor-manufacturing