# Analysis of shot noise limitations due to absorption count in EUV resists

> Research article (Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2015) · cited 18× · AI/ML

**Wikidata**: [openalex:W2026663463](https://www.wikidata.org/wiki/openalex:W2026663463)  
**Source**: https://4ort.xyz/entity/analysis-of-shot-noise-limitations-due-to-absorption-count-in-euv-resists