# Analysis and test of a new MEMS micro-actuator

> Research article (Microsystem Technologies, 2016) · cited 14× · AI/ML

**Wikidata**: [openalex:W2234304775](https://www.wikidata.org/wiki/openalex:W2234304775)  
**Source**: https://4ort.xyz/entity/analysis-and-test-of-a-new-mems-micro-actuator