# Analysis and Experiment of Self-Differential Eddy Current Displacement Sensor for AMBs Used in Molecular Pump

> Research article (IEEE Transactions on Instrumentation and Measurement, 2018) · cited 32× · AI/ML

**Wikidata**: [openalex:W2791635257](https://www.wikidata.org/wiki/openalex:W2791635257)  
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