# Analysis and correction of the distortion error in a DMD based scanning lithography system

> Research article (Optics Communications, 2018) · cited 23× · AI/ML

**Wikidata**: [openalex:W2898526618](https://www.wikidata.org/wiki/openalex:W2898526618)  
**Source**: https://4ort.xyz/entity/analysis-and-correction-of-the-distortion-error-in-a-dmd-based-scanning-lithography-system