# An Optical Interferometry Based MEMS Accelerometer Applicable to Seismic-Grade Measurement

> Research article (IEEE Transactions on Instrumentation and Measurement, 2022) · cited 18× · AI/ML

**Wikidata**: [openalex:W4286540943](https://www.wikidata.org/wiki/openalex:W4286540943)  
**Source**: https://4ort.xyz/entity/an-optical-interferometry-based-mems-accelerometer-applicable-to-seismic-grade-measurement