# An Internal Model Based Iterative Learning Control for Wafer Scanner Systems

> Research article (IEEE/ASME Transactions on Mechatronics, 2019) · cited 31× · AI/ML

**Wikidata**: [openalex:W2964337425](https://www.wikidata.org/wiki/openalex:W2964337425)  
**Source**: https://4ort.xyz/entity/an-internal-model-based-iterative-learning-control-for-wafer-scanner-systems