# An Integrated Model-Data-Based Zero-Phase Error Tracking Feedforward Control Strategy With Application to an Ultraprecision Wafer Stage

> Research article (IEEE Transactions on Industrial Electronics, 2016) · cited 57× · AI/ML

**Wikidata**: [openalex:W2346330105](https://www.wikidata.org/wiki/openalex:W2346330105)  
**Source**: https://4ort.xyz/entity/an-integrated-model-data-based-zero-phase-error-tracking-feedforward-control-strategy-with-application-to-an-ultraprecis