# An Incremental Clustering-Based Fault Detection Algorithm for Class-Imbalanced Process Data

> Research article (IEEE Transactions on Semiconductor Manufacturing, 2015) · cited 53× · AI/ML

**Wikidata**: [openalex:W2343814947](https://www.wikidata.org/wiki/openalex:W2343814947)  
**Source**: https://4ort.xyz/entity/an-incremental-clustering-based-fault-detection-algorithm-for-class-imbalanced-process-data