# An Extended State Observer-Based Run to Run Control for Semiconductor Manufacturing Processes

> Research article (IEEE Transactions on Semiconductor Manufacturing, 2019) · cited 18× · AI/ML

**Wikidata**: [openalex:W2913472609](https://www.wikidata.org/wiki/openalex:W2913472609)  
**Source**: https://4ort.xyz/entity/an-extended-state-observer-based-run-to-run-control-for-semiconductor-manufacturing-processes