# An experimental system combined with a micromachine and double-tilt TEM holder

> Research article (Microelectronic Engineering, 2016) · cited 19× · AI/ML

**Wikidata**: [openalex:W2475002333](https://www.wikidata.org/wiki/openalex:W2475002333)  
**Source**: https://4ort.xyz/entity/an-experimental-system-combined-with-a-micromachine-and-double-tilt-tem-holder