# An Expandable Yield Prediction Framework Using Explainable Artificial Intelligence for Semiconductor Manufacturing

> Research article (Applied Sciences, 2023) · cited 32× · AI/ML

**Wikidata**: [openalex:W4321374432](https://www.wikidata.org/wiki/openalex:W4321374432)  
**Source**: https://4ort.xyz/entity/an-expandable-yield-prediction-framework-using-explainable-artificial-intelligence-for-semiconductor-manufacturing