# An Embedded Sensor System for Real-Time Detecting 5-DOF Error Motions of Rotary Stages

> Research article (Sensors, 2019) · cited 18× · AI/ML

**Wikidata**: [openalex:W2955340304](https://www.wikidata.org/wiki/openalex:W2955340304)  
**Source**: https://4ort.xyz/entity/an-embedded-sensor-system-for-real-time-detecting-5-dof-error-motions-of-rotary-stages