# An efficient plasma-surface interaction surrogate model for sputtering processes based on autoencoder neural networks

> Research article (arXiv (Cornell University), 2021) · cited 24× · AI/ML

**Wikidata**: [openalex:W4200582458](https://www.wikidata.org/wiki/openalex:W4200582458)  
**Source**: https://4ort.xyz/entity/an-efficient-plasma-surface-interaction-surrogate-model-for-sputtering-processes-based-on-autoencoder-neural-networks